椭偏仪在位表征电化学沉积的系统搭建（十六）- 可行性分析

正文

椭偏仪在位表征电化学沉积的系统搭建（十六）- 可行性分析

3.2.4可行性分析

(1)光路可行性分析

如图3-4所示，为了保证对电极不影响光路的传输，其可活动的范围为图中h所示。如果半圆直径为50px，对电极宽25px，上限由电极碰到池体壁决定，则此时入射光的极限入射角为ɵ₁=30°；下限由入射光的入射角决定，图中的入射角ɵ₂=55°，则电极可调的极限zui低位置如图所示。所以在满足对电极不挡光的情况下，入射光的入射角可调范围是30°<ɵ<90°。我们的工对电极选25px×25px，观察窗口直径为75px，所以实际上我们可以调节的入射角度范围更大，且而常用的入射角度为55°到80°，所以这样设计的观察窗口和电极放置可以满足要求。

图3-4观察窗口光路截面分析图

用镀金硅片和电解液(透明溶液)在玻璃皿中调节了准直，不经过玻璃皿，溶液中镀金硅片可以很好的反光；后又把玻璃皿的盖子盖上，验证得知，在垂直于玻璃盖、空气、溶液界面入射时，光斑可以很好的打到电极片上，基本不受光路影响，斜射时光斑就散了。经过实际验证，该池体设计方案可行。

关于调节光斑使其达到圆心，这也可以实现的，因为一旦不是垂直于池体入射，光斑就是分散的。

(2)电极的选择

如图3-5，用Comsol对如图放置的长正方形电极和圆电极进行了阳极电流密度的模拟结果如图3-6示。

图3-5电极电流密度模拟图

从图3-6中可以看出边缘效应随着电极的增大而减小，考虑到电解池尺寸，则选则25px×25px的电极片是比较合适的。从c、d对比可知，圆盘电极的边缘化效应比长方形电极边缘化效应更严重，所以选片电极更合适。

图3-6不同尺寸电极无量纲电流密度模拟图(a)6.25px×6.25px；(b)12.5px×12.5px；(c)25px×25px；(d)半径为12.5px的圆盘电极

3.2.5池体制作

现已经完成了制作，如图3-7所示。池体两端的长方体及电极载体是亚克力板制作，中间的半圆柱体由石英玻璃制作，以上部件定制完成，后期拼接自主完成。

图3-7电解池实物图

了解更多椭偏仪详情，请访问上海昊量光电的官方网页：

https://www.auniontech.com/three-level-56.html

更多详情请联系昊量光电/欢迎直接联系昊量光电

关于昊量光电：

上海昊量光电设备有限公司是光电产品专业代理商，产品包括各类激光器、光电调制器、光学测量设备、光学元件等，涉及应用涵盖了材料加工、光通讯、生物医疗、科学研究、国防、量子光学、生物显微、物联传感、激光制造等；可为客户提供完整的设备安装，培训，硬件开发，软件开发，系统集成等服务。

您可以通过我们昊量光电的官方网站www.auniontech.com了解更多的产品信息，或直接来电咨询4006-888-532。

相关文献：

[1] WONG H S P, FRANK D J, SOLOMON P M et al. Nanoscale cmos[J]. Proceedings of the IEEE, 1999, 87(4): 537-570.

[2] LOSURDO M, HINGERL K. ellipsometry at the nanoscale[M]. Springer Heidelberg New York Dordrecht London. 2013.

[3] DYRE J C. Universal low-temperature ac conductivity of macroscopically disordered nonmetals[J]. Physical Review B, 1993, 48(17): 12511-12526. DOI:10.1103/PhysRevB.48.12511.

[4] CHEN S, KÜHNE P, STANISHEV V et al. On the anomalous optical conductivity dISPersion of electrically conducting polymers: Ultra-wide spectral range ellipsometry combined with a Drude-Lorentz model[J]. Journal of Materials Chemistry C, 2019, 7(15): 4350-4362.

[5] 陈篮，周岩. 膜厚度测量的椭偏仪法原理分析[J]. 大学物理实验, 1999, 12(3): 10-13.

[6] ZAPIEN J A, COLLINS R W, MESSIER R. Multichannel ellipsometer for real time spectroscopy of thin film deposition from 1.5 to 6.5 eV[J]. Review of Scientific Instruments, 2000, 71(9): 3451-3460.

[7] DULTSEV F N, KOLOSOVSKY E A. Application of ellipsometry to control the plasmachemical synthesis of thin TiONx layers[J]. Advances in Condensed Matter Physics, 2015, 2015: 1-8.

[8] DULTSEV F N, KOLOSOVSKY E A. Application of ellipsometry to control the plasmachemical synthesis of thin TiONx layers[J]. Advances in Condensed Matter Physics, 2015, 2015: 1-8.

[9] YUAN M, YUAN L, HU Z et al. In Situ Spectroscopic Ellipsometry for Thermochromic CsPbI3 Phase Evolution Portfolio[J]. Journal of Physical Chemistry C, 2020, 124(14): 8008-8014.

[10] 焦杨景.椭偏仪在位表征电化学沉积的系统搭建.云南大学说是论文,2022.

[11] CANEPA M, MAIDECCHI G, TOCCAFONDI C et al. Spectroscopic ellipsometry of self assembLED monolayers: Interface effects. the case of phenyl selenide SAMs on gold[J]. Physical Chemistry Chemical Physics, 2013, 15(27): 11559-11565. DOI:10.1039/c3cp51304a.

[12] FUJIWARA H, KONDO M, MATSUDA A. Interface-layer formation in microcrystalline Si:H growth on ZnO substrates studied by real-time spectroscopic ellipsometry and infrared spectroscopy[J]. Journal of Applied Physics, 2003, 93(5): 2400-2409.

[13] FUJIWARA H, TOYOSHIMA Y, KONDO M et al. Interface-layer formation mechanism in (formula presented) thin-film growth studied by real-time spectroscopic ellipsometry and infrared spectroscopy[J]. Physical Review B - Condensed Matter and Materials Physics, 1999, 60(19): 13598-13604.

[14] LEE W K, KO J S. Kinetic model for the simulation of hen egg white lysozyme adsorption at solid/water interface[J]. Korean Journal of Chemical Engineering, 2003, 20(3): 549-553.

[15] STAMATAKI K, PAPADAKIS V, EVEREST M A et al. Monitoring adsorption and sedimentation using evanescent-wave cavity ringdown ellipsometry[J]. Applied Optics, 2013, 52(5): 1086-1093.

[16] VIEGAS D, FERNANDES E, QUEIRÓS R et al. Adapting Bobbert-Vlieger model to spectroscopic ellipsometry of gold nanoparticles with bio-organic shells[J]. Biomedical Optics Express, 2017, 8(8): 3538.

[17] ARWIN H. Application of ellipsometry techniques to biological materials[J]. Thin Solid Films, 2011, 519(9): 2589-2592.

[18] ZIMMER A, VEYS-RENAUX D, BROCH L et al. In situ spectroelectrochemical ellipsometry using super continuum white laser: Study of the anodization of magnesium alloy [J]. Journal of Vacuum Science & Technology B, 2019, 37(6): 062911.

[19] ZANGOOIE S, BJORKLUND R, ARWIN H. Water Interaction with Thermally Oxidized Porous Silicon Layers[J]. Journal of The Electrochemical Society, 1997, 144(11): 4027-4035.

[20] KYUNG Y B, LEE S, OH H et al. Determination of the optical functions of various liquids by rotating compensator multichannel spectroscopic ellipsometry[J]. Bulletin of the Korean Chemical Society, 2005, 26(6): 947-951.

[21] OGIEGLO W, VAN DER WERF H, TEMPELMAN K et al. Erratum to ― n-Hexane induced swelling of thin PDMS films under non-equilibrium nanofiltration permeation conditions, resolved by spectroscopic ellipsometry‖ [J. Membr. Sci. 431 (2013), 233-243][J]. Journal of Membrane Science, 2013, 437: 312..

[22] BROCH L, JOHANN L, STEIN N et al. Real time in situ ellipsometric and gravimetric monitoring for electrochemistry experiments[J]. Review of Scientific Instruments, 2007, 78(6).

[23] BISIO F, PRATO M, BARBORINI E et al. Interaction of alkanethiols with nanoporous cluster-assembled Au films[J]. Langmuir, 2011, 27(13): 8371-8376.

[24] 李广立. 氧化亚铜薄膜的制备及其光电性能研究[D]. 西南交通大学, 2016.

[25] 董金矿. 氧化亚铜薄膜的制备及其光催化性能的研究[D]. 安徽建筑大学, 2014.

[26] 张桢. 氧化亚铜薄膜的电化学制备及其光催化和光电性能的研究[D]. 上海交通大学材料科 学与工程学院, 2013.

[27] DISSERTATION M. Cellulose Derivative and Lanthanide Complex Thin Film Cellulose Derivative and Lanthanide Complex Thin Film[J]. 2017.

[28] NIE J, YU X, HU D et al. Preparation and Properties of Cu2O/TiO2 heterojunction Nanocomposite for Rhodamine B Degradation under visible light[J]. ChemistrySelect, 2020, 5(27): 8118-8128.

[29] STRASSER P, GLIECH M, KUEHL S et al. Electrochemical processes on solid shaped nanoparticles with defined facets[J]. Chemical Society Reviews, 2018, 47(3): 715-735.

[30] XU Z, CHEN Y, ZHANG Z et al. Progress of research on underpotential deposition——I. Theory of underpotential deposition[J]. Wuli Huaxue Xuebao/ Acta Physico - Chimica Sinica, 2015, 31(7): 1219-1230.

[31] PANGAROV n. Thermodynamics of electrochemical phase formation and underpotential metal deposition[J]. Electrochimica Acta, 1983, 28(6): 763-775.

[32] KAYASTH S. ELECTRODEPOSITION STUDIES OF RARE EARTHS[J]. Methods in Geochemistry and Geophysics, 1972, 6(C): 5-13.

[33] KONDO T, TAKAKUSAGI S, UOSAKI K. Stability of underpotentially deposited Ag layers on a Au(1 1 1) surface studied by surface X-ray scattering[J]. Electrochemistry Communications, 2009, 11(4): 804-807.

[34] GASPAROTTO L H S, BORISENKO N, BOCCHI N et al. In situ STM investigation of the lithium underpotential deposition on Au(111) in the air- and water-stable ionic liquid 1-butyl-1-methylpyrrolidinium bis(trifluoromethylsulfonyl)amide[J]. Physical Chemistry Chemical Physics, 2009, 11(47): 11140-11145.

[35] SARABIA F J, CLIMENT V, FELIU J M. Underpotential deposition of Nickel on platinum single crystal electrodes[J]. Journal of Electroanalytical Chemistry, 2018, 819(V): 391-400.

[36] BARD A J, FAULKNER L R, SWAIN E et al. Fundamentals and Applications[M]. John Wiley & Sons, Inc, 2001.

[37] SCHWEINER F, MAIN J, FELDMAIER M et al. Impact of the valence band structure of Cu2O on excitonic spectra[J]. Physical Review B, 2016, 93(19): 1-16.

 [38] XIONG L, HUANG S, YANG X et al. P-Type and n-type Cu2O semiconductor thin films: Controllable preparation by simple solvothermal method and photoelectrochemical properties[J]. Electrochimica Acta, 2011, 56(6): 2735-2739.

[39] KAZIMIERCZUK T, FRÖHLICH D, SCHEEL S et al. Giant Rydberg excitons in the copper oxide Cu2O[J]. Nature, 2014, 514(7522): 343-347.

[40] RAEBIGER H, LANY S, ZUNGER A. Origins of the p-type nature and cation deficiency in Cu2 O and related materials[J]. Physical Review B - Condensed Matter and Materials Physics, 2007, 76(4): 1-5.

[41] 舒云. Cu2O薄膜的电化学制备及其光电化学性能的研究[D]. 云南大学物理与天文学院，2019.