多波长椭偏仪/膜厚测量仪

Film-Sense多波长椭偏仪

上海昊量光电推出的多波长椭偏仪采用长寿命的LED光源，可分别提供405nm、450nm、465nm、525nm、595nm、635nm、660nm、850nm、950nm六种不同波长，并使用无移动部件的椭偏仪，紧凑的系统提供快速可靠的薄膜测量。

通过1秒的测量可以精确的测量0-5000nm的大多数透明薄膜的厚度。并可以获得n和k等光学常量。

相比于单波长椭偏仪，多波长椭偏仪可测定薄膜厚度，对于透明薄膜测量厚度至少可达5μm，不存在厚度周期性问题；可确定样品其它其它参数特性例如薄膜粗糙度、多层膜厚度等；对数据分析提供检测依据，一个良好的分析模型应该适用于不同波长的数据；对于薄的薄膜（<10nm）多波长椭偏仪提供的数据信息量可以与光谱椭偏仪相媲美。

应用案例：

原位测量：

                          AUTFS-1 Mounted on Kurt Lesker ALD Chamber                                                              AUT FS-1 Mounted on AJA Sputter Chamber

选配件：

1、聚焦选项：将样品上的光束缩小至0.8 x 1.9 mm 或0.3 x 0.7 mm

2、聚焦束检验选项

    3、自动Mapping系统

产品特点：

•  多波长

• 椭偏检测器中无移动部件

• 优异的测量精度（优于0.001nm）

• 可原位测量

客户感言：

“These FS-1 ellipsometers are one of the best upgrades to our atomic layer processing reactors, and have now become an integral part of all our experiments on ALD and ALE.”

 ——Dr. Sumit Agarwal - Colorado School of Mines 

“这些FS-1椭偏仪是我们原子层处理反应堆的蕞佳升级之一，现在已经成为我们所有ALD和ALE实验的组成部分”

 ——Sumit Agarwal博士-科罗拉多矿业学院

“The Film Sense FS-1 in situ ellipsometer has greatly facilitated data acquisition and understanding of the thin film deposition processes in our lab. The instrument was relatively easy to incorporate onto a vacuum chamber, and includes a user-friendly manual and tutorial to explain basic operation. With this tool, we are able to collect much more information during a deposition, including measurements between ALD half-cycles that are not feasible with ex situ techniques. These ellipsometers have become an integral part of our laboratory research, and we look forward to continuing to work with Film Sense in the future."

——Rachel Nye, PhD - student in Chemical Engineering     Parsons Research Group, North Carolina State University

“薄膜传感FS-1原位椭偏仪极大地促进了我们实验室的数据采集和对薄膜沉积过程的理解。该仪器相对容易合并到真空室，并包括一个用户友好的手册和教程来解释基本操作。有了这个工具，我们可以在沉积过程中收集更多的信息，包括在ALD半个周期之间的测量，而这在原位技术中是不可实现的。这些椭圆计已经成为我们实验室研究不可或缺的一部分，我们期待着在未来继续与Film Sense合作。”

 —— 瑞秋·奈，化学工程博士生  帕森斯研究小组，北卡罗莱纳州立大学

“Overall performance, affordability and ease of use has made the FS-1 a workhorse for our ALD process as well as equipment development efforts.  The next generation FS-1EX provides a combination of higher beam intensity and wider spectral range improving both precision and accuracy.  For metallic thin films such as TiN, Pt and Ru, two additional IR wavelengths enhance the ability to monitor film thickness and resistivity in-situ during growth.  This enhanced performance helps us to streamline development efforts by effectively understanding the impact of different process conditions on film quality in real-time.”

——Bruce Rayner - Principal Scientist       Atomic Layer Deposition, Kurt J. Lesker Company

“FS-1的整体性能、可承受性和易用性使其成为我们ALD工艺和设备开发的主力。下一代FS-1EX提供了更高的光束强度和更宽的光谱范围的组合，提高了精度和精度。对于金属薄膜，如TiN, Pt和Ru，两个额外的IR波长增强了在生长过程中监测薄膜厚度和电阻率的能力。通过实时有效地了解不同工艺条件对胶片质量的影响，这种增强的性能有助于我们简化开发工作。”

——Bruce Rayner - Kurt J. Lesker公司原子层沉积首席科学家

"The FS-1 is an excellent basic ellipsometer. Reliable, easy to use, low maintenance, and great value for money. Films Sense have been great at helping us characterize our thin films, and get accurate measurements. Fully recommended. ”

——Dr Ruy Sebastian Bonilla - Research Fellow     Oxford Materials Department

“FS-1是一款优良的基础椭偏计。可靠，易于使用，低维护，和巨大的价值。“Film Sense”在帮助我们描述我们的薄膜和获得精确的测量方面做得很好。完全推荐。”

——Ruy Sebastian Bonilla博士-牛津大学材料系研究员

“We have purchased four Film Sense products for our small R&D group.  We have three FS-1 units and one FS-1EX unit with the RT300 mapping stage.  The Film Sense software is the most intuitive and easiest to use of all the ellipsometers I have experience using.  Our favorite feature is the multi-sample analysis method.   This feature allows you to determine the optical constants for new or poorly fitting films by simply measuring a small number of samples with various thicknesses.  Having knowledge of the actual thickness values is not even necessary.  The software understands the optical constants must be the same for all samples, and each sample varies only in thickness.  The user just needs to collect the data and press the fit button.  New films layers are created in just a couple of minutes.  We also love the automatic adjustment for sample height on the RT300 mapping stage.  Our process engineers are constantly adjusting the height on competitor’s units without this automatic feature.”

——Staff Systems Engineer at large semiconductor OEM

“我们已经为我们的小研发团队购买了四款Film Sense产品。我们有三个FS-1单元和一个FS-1EX单元与RT300绘图阶段。在我使用过的所有椭偏仪中，Film Sense软件是蕞直观和蕞容易使用的。我们蕞喜欢的特征是多样本分析方法。这个特性允许您通过简单地测量少量不同厚度的样品来确定新的或不合适的薄膜的光学常数。甚至没有必要了解实际厚度值。该软件理解所有样品的光学常数必须相同，并且每个样品只在厚度上变化。用户只需要收集数据并按下适合按钮。只需几分钟就能创建出新的胶片层。我们也喜欢在RT300绘图台上自动调整样品高度。我们的工艺工程师一直在调整竞争对手产品的高度，但没有这种自动功能。”

——大型半导体OEM的系统工程师

"The Film Sense FS-1 is a powerful and reliable tool for in-situ characterization of ALD films. The real-time dynamic thickness measurements were critical to understanding the growth characteristics of multicomponent oxides, such as lead zirconate-titanate (PZT), which I studied for my dissertation research through the University of Maryland. The in-situ thickness data I collected with the FS-1 allowed me to screen precursors much more quickly than if I had to rely on ex-situ characterization methods. I continuously used the FS-1 for over five years and haven't experienced any downtime other than during occasional realignments when switching from ex-situ to in-situ measurement modes. The FS-1 would make a valuable addition to any laboratory looking to enhance their nondestructive thin-film thickness measurement capability."

——Nicholas A Strnad, Ph. D.

“Film Sense FS-1是一种强大而可靠的ALD薄膜原位表征工具。实时动态厚度测量对于了解锆钛酸铅(PZT)等多组分氧化物的生长特性至关重要，这是我在马里兰大学进行论文研究时所研究的。与非原位表征方法相比，我使用FS-1收集的原位厚度数据使我能够更快地筛选前体。我连续使用FS-1五年多了，除了从原位测量模式切换到原位测量模式时偶尔进行重新调整外，没有经历过任何停机。FS-1将为任何希望增强其无损薄膜厚度测量能力的实验室提供有价值的补充。”
——Nicholas A Strnad博士

"To summarize our nearly 5-year ownership experience of the FS-1 tool, all I can say, it’s most probably by far the highest performance/cost tool I have ever acquired in my independent research career. Besides the tool itself, as an ellipsometry expert, Film Sense has been very responsive to our data analysis/fit inquiries and saved us valuable research time by sharing his expertise. We are looking forward to getting their latest generation system with additional features that we can integrate for good on either of the reactors. Right now, our single FS-1 tool is going back-and-forth between thermal and plasma reactor based on our needs."

——Necmi Biyikli, Assistant Professor,
Electrical and Computer Engineering, University of Connecticut

“总结我们对FS-1工具近5年的拥有经验，我只能说，它可能是迄今为止我在独立研究职业生涯中获得的性能/成本蕞高的工具。除了工具本身，作为一个椭偏仪专家，Film Sense已经非常响应我们的数据分析/合适的询问，并通过分享他的专业知识节省了我们宝贵的研究时间。我们期待着得到他们蕞新的系统，附加的功能，我们可以在任何一个反应堆上永久集成。现在，我们单一的FS-1工具正在根据我们的需要在热反应堆和等离子反应堆之间来回切换。”
—— Necmi Biyikli助理教授     电子与计算机工程，康涅狄格大学

"The system (FS-XY150) is great and we are having an increase of users using it. I am happy with the system and I direct users to use it when I am training them on our ALD deposition system. It gives great results and the customer support is quick and helpful too."

——Tony Whipple, Scientist   Minnesota Nano Center

“这个系统(FS-XY150)很棒，越来越多的用户在使用它。我对系统很满意，我指导用户使用它时，我正在培训他们对我们的ALD沉积系统。它能带来很好的结果，客户支持也很快很有帮助。”
——托尼·惠普尔，科学家   明尼苏达纳米中心