椭偏仪在位表征电化学沉积的系统搭建（二十七）- 介电常数的演变

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椭偏仪在位表征电化学沉积的系统搭建（二十七）- 介电常数的演变

1、短波范围(300-500 nm)

图4-11是经过拟合得到的在短波段的n、k及和。从图中可以看到不同沉积时间下得到的曲线随波长的变化大致趋势一致，但在细节方面及数值上会有变化且和0s有较差别。n、k值的变化前面有叙述，这里更加明显的看到了360s时得到的各个值和其他时间的差别，说明该时间下沉积得到的薄膜比较特殊，如前所述有待进一步验证。从图4-11(c)图来看整体上有无沉积对比较明显，0s时从正值一致减小到负值，这同样反映的是金属Au的特性。其余时间180s的zui大，360s的zui小且在300nm处的值小于0，其它时间值比较接近。对比0s在320nm附近出现新的波包。从图4-11(d)图来看在0s时数值都比有沉积的大，且在400-500nm段变化趋势不同，0s为增加趋势其他时间为减小趋势。0s时在370nm附近出现波包，其他沉积时间在310nm和400nm附近出现波包。认为310nm附近的波包是新出现的，而400nm附近的波包源于0s时的370nm处的波包只是它发生了红移。对不同沉积时间相互对比，180s的变化值比较小，且看起来和其他时间有差异，这可能是由于沉积薄膜厚度引起。时间增加到360s以后，的变化趋势基本一致，只是360s比其他时间的小，且随着波长的增加其差别也变大。

图4-11拟合得到的不同沉积时间薄膜的300-500nm波段的(a)n、(b)k及介电常数(c)实部和(d)虚部

2、长波范围(500-800nm)

图4-12是模拟得到的各个沉积时间的介电常数实部和虚部相对于1s的变化Δ和Δ以及相对于180s的变化率。图4-12(a)在300-600nm波段Δ为，600-800nm波段Δ为正值，整体的变化趋势。从图4-12(b)来看Δ除了360s，其余的在470nm-600nm附近是负值，其余是正值。360s在300nm-420nm波段为正值，其余波段负值4-12(c)显示Δ/的变化规律和Δ的比较相似，但是放大了600-800nm波段的变化。从4-12(d)来看Δ/的变化规律和Δ相似，但是同样在600-800nm波段其变比Δ的要大。

Δ、Δ在图中出现的跃迁可能是沉积基底表面的干涉现象的要进验另外Δ/和Δ/图线的长波段的杂乱同样表明在长波段(500-800nm)该测试系统对薄膜的表征不理想，后续研究可尽量在小于500nm的波段进行。

图4-12相对于180s沉积的变化(a)；(b)；(c)/;(d)/

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